ASTM E2530-2006 用Si(111)单原子层级对原子力显微镜进行次纳米位移级的Z倍率校准的标准规程
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【英文标准名称】:StandardPracticeforCalibratingtheZ-MagnificationofanAtomicForceMicroscopeatSubnanometerDisplacementLevelsUsingSi(111)MonatomicSteps
【原文标准名称】:用Si(111)单原子层级对原子力显微镜进行次纳米位移级的Z倍率校准的标准规程
【标准号】:ASTME2530-2006
【标准状态】:现行
【国别】:
【发布日期】:2006
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E42.14
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:校准;位移;力;放大倍率;显微镜;国际单位制;SI单位;台阶
【英文主题词】:atomicforcemicroscope;atomicsteps;AFM;calibration;measurement;silicon;z-magnification
【摘要】:Carefuluseofthispracticecanyieldcalibratedz-magnificationstraceabletotheSIunitoflengthwithuncertainties(k=2)ofapproximately7%overheightrangesofapproximately1nm.1.1Thispracticecoversameasurementproceduretocalibratethez-scaleofanatomicforcemicroscopeusingSi(111)monatomicstepheightspecimens.1.2ApplicationsThisprocedureisapplicableeitherinambientorvacuumconditionwhentheatomicforcemicroscope(AFM)isoperatedatitshighestlevelsofz-magnification,thatis,inthenanometerandsub-nanometerrangesofz-displacement.TheserangesofmeasurementarerequiredwhentheAFMisusedtomeasurethesurfacesofsemiconductors,opticalsurfaces,andotherhightechnologycomponents.1.3ThevaluesstatedinSIunitsaretoberegardedasthestandard.Thevaluesgiveninparenthesesareforinformationonly.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:G04
【国际标准分类号】:71_040_50
【页数】:6P.;A4
【正文语种】:
【原文标准名称】:用Si(111)单原子层级对原子力显微镜进行次纳米位移级的Z倍率校准的标准规程
【标准号】:ASTME2530-2006
【标准状态】:现行
【国别】:
【发布日期】:2006
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E42.14
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:校准;位移;力;放大倍率;显微镜;国际单位制;SI单位;台阶
【英文主题词】:atomicforcemicroscope;atomicsteps;AFM;calibration;measurement;silicon;z-magnification
【摘要】:Carefuluseofthispracticecanyieldcalibratedz-magnificationstraceabletotheSIunitoflengthwithuncertainties(k=2)ofapproximately7%overheightrangesofapproximately1nm.1.1Thispracticecoversameasurementproceduretocalibratethez-scaleofanatomicforcemicroscopeusingSi(111)monatomicstepheightspecimens.1.2ApplicationsThisprocedureisapplicableeitherinambientorvacuumconditionwhentheatomicforcemicroscope(AFM)isoperatedatitshighestlevelsofz-magnification,thatis,inthenanometerandsub-nanometerrangesofz-displacement.TheserangesofmeasurementarerequiredwhentheAFMisusedtomeasurethesurfacesofsemiconductors,opticalsurfaces,andotherhightechnologycomponents.1.3ThevaluesstatedinSIunitsaretoberegardedasthestandard.Thevaluesgiveninparenthesesareforinformationonly.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:G04
【国际标准分类号】:71_040_50
【页数】:6P.;A4
【正文语种】:
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